Stress and Refractive Index Control of SiO<sub>2</sub> Thin Films for Suspended Waveguides
Film stress and refractive index play an important role in the fabrication of suspended waveguides. SiO<sub>2</sub> waveguides were successfully fabricated on multiple substrates including Si, Ge, and Al<sub>2</sub>O<sub>3</sub> wafers; the waveguides were deposit...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-10-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/10/11/2105 |