Carbon Nanotube Integration with a CMOS Process

Carbon Nanotube Integration with a CMOS Process

This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully invest...

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Bibliographic Details
Main Authors: Maximiliano S. Perez, Betiana Lerner, Daniel E. Resasco, Pablo D. Pareja Obregon, Pedro M. Julian, Pablo S. Mandolesi, Fabian A. Buffa, Alfredo Boselli, Alberto Lamagna
Format: Article
Language:English
Published: MDPI AG 2010-04-01
Series:Sensors
Subjects:
carbon nanotube sensor
CMOS integration
microchip sensor
SWCNT
Online Access:http://www.mdpi.com/1424-8220/10/4/3857/

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http://www.mdpi.com/1424-8220/10/4/3857/

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