Modeling of a Bio Sensor Based on Detection of Antigens Concentration Using an Electrically Actuated Micro Cantilever

• Main Authors: Hadi Madinei, Ali-Asghar Keyvani-Janbahan, Mehdi Atashparva, Rasool Shabani, Ghader Rezazadeh
• Format: Article
• Language: English
• Published: IFSA Publishing, S.L. 2011-02-01
• Series: Sensors & Transducers
• Subjects: MEMS; Capacitive biosensors; Frequency shifting; Sensitivity
• Online Access: http://www.sensorsportal.com/HTML/DIGEST/february_2011/P_768.pdf

Nano molecular adsorption of bio particles made it possible to design and produces of some micro sensors that can sense some vital characteristics of a patient. In this paper, electromechanical characteristics of such a device are investigated and a novel suggestion is made to increase its sensitivity. The device is a micro-cantilever beam submerged in blood that it has been proven that by applying an electrical potential difference between the beam and a supplemented substrate it will work more precisely. In order to investigate the electromechanical behavior of its structure, the well-known Euler-Bernoulli beam theory and differentially parallel capacitor assumption is hired. Due to the nonlinearity of governing differential equations, there is no known explicit solution, so in order to gain an approximate solution, Galerkin based step by step linearization method (SSLM) (for static deflection) is used then the equation of dynamic motion is linearized about an electrostatically deflected position so mode summation method is implemented. In addition some sensing methods including capacitive, resonance frequency shifting method have been investigated.