HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE

HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE

The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bea...

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Bibliographic Details
Main Authors: František Lofaj, Margita Kabátová
Format: Article
Language:English
Published: CTU Central Library 2020-06-01
Series:Acta Polytechnica CTU Proceedings
Subjects:
hardness, indentation modulus, substrate effect, w-c:h coating
Online Access:https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687
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spelling doaj-d8b823fbfa2b4ea1b703a90501d13d5c2020-11-25T03:18:21ZengCTU Central LibraryActa Polytechnica CTU Proceedings2336-53822020-06-01270626610.14311/APP.2020.27.00625217HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPEFrantišek Lofaj0Margita Kabátová1Slovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, SlovakiaSlovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, SlovakiaThe effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HIT/EIT ratio dependencies obtained on Al alloy vs. steel and Si wafer substrates occurred. Thus, the effect of substrate type on the measurementlevaluation was confirmed.https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687hardness, indentation modulus, substrate effect, w-c:h coating
collection DOAJ
language English
format Article
sources DOAJ
author František Lofaj
Margita Kabátová
spellingShingle František Lofaj
Margita Kabátová
HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
Acta Polytechnica CTU Proceedings
hardness, indentation modulus, substrate effect, w-c:h coating
author_facet František Lofaj
Margita Kabátová
author_sort František Lofaj
title HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
title_short HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
title_full HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
title_fullStr HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
title_full_unstemmed HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
title_sort hardness of hybrid pvd-pecvd w-c:h coatings vs. substrate type
publisher CTU Central Library
series Acta Polytechnica CTU Proceedings
issn 2336-5382
publishDate 2020-06-01
description The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HIT/EIT ratio dependencies obtained on Al alloy vs. steel and Si wafer substrates occurred. Thus, the effect of substrate type on the measurementlevaluation was confirmed.
topic hardness, indentation modulus, substrate effect, w-c:h coating
url https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687
work_keys_str_mv AT frantiseklofaj hardnessofhybridpvdpecvdwchcoatingsvssubstratetype
AT margitakabatova hardnessofhybridpvdpecvdwchcoatingsvssubstratetype
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