HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bea...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
CTU Central Library
2020-06-01
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| Series: | Acta Polytechnica CTU Proceedings |
| Subjects: | |
| Online Access: | https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687 |