Synthesis and Fabrication of In2O3: CdO Nanoparticles for NO2 Gas Sensor

The physical and morphological characteristics of porous silicon (PS) synthesized via gas sensor was assessed by electrochemical etching for a Si wafer in diluted HF acid in water (1:4) at different etching times and different currents. The morphology for PS wafers by AFM show that the average pore...

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Bibliographic Details
Main Author: Baghdad Science Journal
Format: Article
Language:Arabic
Published: College of Science for Women, University of Baghdad 2018-09-01
Series:Baghdad Science Journal
Subjects:
Online Access:http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/2475
Description
Summary:The physical and morphological characteristics of porous silicon (PS) synthesized via gas sensor was assessed by electrochemical etching for a Si wafer in diluted HF acid in water (1:4) at different etching times and different currents. The morphology for PS wafers by AFM show that the average pore diameter varies from 48.63 to 72.54 nm with increasing etching time from 5 to 15min and from 72.54 to 51.37nm with increasing current from 10 to 30 mA. From the study, it was found that the gas sensitivity of In2O3: CdO semiconductor, against NO2 gas, directly correlated to the nanoparticles size, and its sensitivity increases with increasing operating temperature.
ISSN:2078-8665
2411-7986