The Analysis Of Structure For The Multi-Layered Of Ge/TiO2 Films Prepared By The Differential Prressure Co-Sputtering

The Analysis Of Structure For The Multi-Layered Of Ge/TiO2 Films Prepared By The Differential Prressure Co-Sputtering

We tried to fabricate the Ge/TiO2 composite films with the differential pressure (pumping) co-sputtering (DPCS) apparatus in order to improve the optical properties. In the study, the micro structure of these thin films has been evaluated. TEM image revealed that the thin film was alternately layere...

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Bibliographic Details
Main Authors: Adachi Y., Abe S., Matsuda K., Nose M.
Format: Article
Language:English
Published: Polish Academy of Sciences 2015-06-01
Series:Archives of Metallurgy and Materials
Subjects:
TiO2
Ge
solar cells
sputtering
Online Access:http://www.degruyter.com/view/j/amm.2015.60.issue-2/amm-2015-0239/amm-2015-0239.xml?format=INT

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