| Summary: | This paper investigated the influence of gas humidity (1%, 3%, 8%, 10%, and 12%) on the characteristics of a microwave-induced atmospheric plasma jet. The plasma discharge was generated by a microwave solid-state source with a H2O–Ar mixture gas flow of 8.1 L/min. The variation in energy efficiency, O and OH concentrations, rotational temperature of heavy species, shapes of plasma plumes with different humidities, and microwave input powers were recorded and analyzed. The results showed that the concentrations of O and OH increase monotonously with gas humidity at higher input powers while they fluctuate with gas humidity at lower input powers. With an increase in the H2O/Ar ratio from 1% to 12%, the energy efficiency of the plasma generator decreases, and the plasma plumes become shorter and thinner. The rotational temperature of plasma at the nozzle also showed positive correlation with increasing humidity. Adding more input power would make all the values of these parameters increase. This paper is supposed to be helpful for the research of the interaction mechanism of mix gas plasma and microwave power and for improving the effect of plasma treating biomedical materials.
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