MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer

MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer

The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current through the masses interacting with a static magnet...

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Bibliographic Details
Main Authors: Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovacs, Andreas Kainz, Johannes Schalko, Franz Keplinger
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
gradiometer
Lorentz force
MOEMS
Online Access:http://www.mdpi.com/2504-3900/2/13/724

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