Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

In this paper we study in detail the post-growth annealing of a copper-containing material deposited with focused electron beam induced deposition (FEBID). The organometallic precursor Cu(II)(hfac)2 was used for deposition and the results were compared to that of compared to earlier experiments with...

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Bibliographic Details
Main Authors: Aleksandra Szkudlarek, Alfredo Rodrigues Vaz, Yucheng Zhang, Andrzej Rudkowski, Czesław Kapusta, Rolf Erni, Stanislav Moshkalev, Ivo Utke
Format: Article
Language:English
Published: Beilstein-Institut 2015-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Cu(hfac)2
Cu nanocrystals
focused electron beam induced deposition (FEBID)
post-growth annealing of Cu–C material
Online Access:https://doi.org/10.3762/bjnano.6.156

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