Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering

Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering

We report the self-buckling (or peeling off) of cubic Cu3N films deposited by DC magnetron sputtering of a Cu target in a nitrogen environment at a gas pressure of 1 Pa. The deposited layer partially peels off as it is exposed to ambient air at atmospheric pressure, but still adheres to the substrat...

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Bibliographic Details
Main Authors: Abhijit Majumdar, Steffen Drache, Harm Wulff, Arun Kumar Mukhopadhyay, Satyaranjan Bhattacharyya, Christiane A. Helm, Rainer Hippler
Format: Article
Language:English
Published: MDPI AG 2017-04-01
Series:Coatings
Subjects:
thin film deposition
copper nitride
magnetron sputtering
crystal structure
Online Access:http://www.mdpi.com/2079-6412/7/5/64

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