Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning dev...

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Bibliographic Details
Main Authors:	Rohit Mishra, Wilfried Grange, Martin Hegner
Format:	Article
Language:	English
Published:	Hindawi Limited 2012-01-01
Series:	Journal of Sensors
Online Access:	http://dx.doi.org/10.1155/2012/617386

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