Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups
Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning dev...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2012-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2012/617386 |