Enhanced permeability dielectric FeCo/Al2O3 multilayer thin films with tailored properties deposited by magnetron sputtering on silicon

Enhanced permeability dielectric FeCo/Al2O3 multilayer thin films with tailored properties deposited by magnetron sputtering on silicon

We have studied the structural and magnetic properties of enhanced-permeability-dielectric FeCo/Al2O3-multilayer thin films deposited on 8"-Si wafers in an industrial magnetron sputtering system. The EPD-multilayers consist of 25 periods of alternating nanometer-thick FeCo-layers deposited by D...

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Bibliographic Details
Main Authors: Claudiu V. Falub, Srinivas V. Pietambaram, Oguz Yildirim, Mojmír Meduňa, Ondrej Caha, Rachid Hida, Xue Zhao, Jan Ambrosini, Hartmut Rohrmann, Hans J. Hug
Format: Article
Language:English
Published: AIP Publishing LLC 2019-03-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5079477

Internet

http://dx.doi.org/10.1063/1.5079477

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