Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films

Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films

Titanium microstripes on silicon dioxide substrates are oxidized locally by applying voltages on-chip to lateral electrodes under ambient conditions. This technique enables profound modifications of the electronic circuit. As an example, we transform Ti films decorated by a sub-monolayer of platinum...

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Bibliographic Details
Main Authors: S. Herbertz, D. Welk, T. Heinzel
Format: Article
Language:English
Published: AIP Publishing LLC 2018-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5025764
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spelling doaj-d04b5940eb694867a2818111d1a50fb02020-11-25T01:15:18ZengAIP Publishing LLCAIP Advances2158-32262018-05-0185055301055301-610.1063/1.5025764004805ADVLateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium filmsS. Herbertz0D. Welk1T. Heinzel2Solid State Physics Laboratory, Heinrich-Heine-Universität Düsseldorf, 40204 Düsseldorf, GermanySolid State Physics Laboratory, Heinrich-Heine-Universität Düsseldorf, 40204 Düsseldorf, GermanySolid State Physics Laboratory, Heinrich-Heine-Universität Düsseldorf, 40204 Düsseldorf, GermanyTitanium microstripes on silicon dioxide substrates are oxidized locally by applying voltages on-chip to lateral electrodes under ambient conditions. This technique enables profound modifications of the electronic circuit. As an example, we transform Ti films decorated by a sub-monolayer of platinum into hydrogen gas microsensors in an otherwise completed device by a silicon-MOS compatible process.http://dx.doi.org/10.1063/1.5025764
collection DOAJ
language English
format Article
sources DOAJ
author S. Herbertz
D. Welk
T. Heinzel
spellingShingle S. Herbertz
D. Welk
T. Heinzel
Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
AIP Advances
author_facet S. Herbertz
D. Welk
T. Heinzel
author_sort S. Herbertz
title Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
title_short Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
title_full Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
title_fullStr Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
title_full_unstemmed Lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
title_sort lateral hydrogen microsensors prepared on-chip by local oxidation of platinum-decorated titanium films
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2018-05-01
description Titanium microstripes on silicon dioxide substrates are oxidized locally by applying voltages on-chip to lateral electrodes under ambient conditions. This technique enables profound modifications of the electronic circuit. As an example, we transform Ti films decorated by a sub-monolayer of platinum into hydrogen gas microsensors in an otherwise completed device by a silicon-MOS compatible process.
url http://dx.doi.org/10.1063/1.5025764
work_keys_str_mv AT sherbertz lateralhydrogenmicrosensorspreparedonchipbylocaloxidationofplatinumdecoratedtitaniumfilms
AT dwelk lateralhydrogenmicrosensorspreparedonchipbylocaloxidationofplatinumdecoratedtitaniumfilms
AT theinzel lateralhydrogenmicrosensorspreparedonchipbylocaloxidationofplatinumdecoratedtitaniumfilms
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