Development of an CNT field emission UHV ionization gauge with customized electronics
An ionization vacuum gauge with carbon nanotube (CNT) cathode was designed for measurement of ultra high vacuum (UHV). The sensor was constructed based on Bayard-Alpert type gauge. The key index of the control unit is determined by theoretical analysis and experimental results. A customized detectio...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5052304 |