Self-Calibration and Performance Control of MEMS with Applications for IoT
A systemic problem for microelectromechanical systems (MEMS) has been the large gap between their predicted and actual performances. Due to process variations, no two MEMS have been able to perform identically. In-factory calibration is often required, which can represent as much as three-fourths of...
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| Format: | Article |
| Language: | English |
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MDPI AG
2018-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/18/12/4411 |