Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates

We present results of scanning transmission electron tomography on GaN/(In,Ga)N/GaN nanocolumns (NCs) that grew uniformly inclined towards the patterned, semi-polar GaN( 11 2...

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Main Authors: M. Niehle, A. Trampert, S. Albert, A. Bengoechea-Encabo, E. Calleja
Format: Article
Language:English
Published: AIP Publishing LLC 2015-03-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4914102
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spelling doaj-ce833cb1804349708bcd7e819537041f2020-11-24T21:09:35ZengAIP Publishing LLCAPL Materials2166-532X2015-03-0133036102036102-510.1063/1.4914102003503APMElectron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templatesM. Niehle0A. Trampert1S. Albert2A. Bengoechea-Encabo3E. Calleja4Paul-Drude-Institut für Festkörperelektronik, Hausvogteiplatz 5-7, 10117 Berlin, GermanyPaul-Drude-Institut für Festkörperelektronik, Hausvogteiplatz 5-7, 10117 Berlin, GermanyISOM and Departamento de Ingeniería Electrónica, ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, SpainISOM and Departamento de Ingeniería Electrónica, ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, SpainISOM and Departamento de Ingeniería Electrónica, ETSI Telecomunicación, Universidad Politécnica de Madrid, Ciudad Universitaria s/n, 28040 Madrid, Spain We present results of scanning transmission electron tomography on GaN/(In,Ga)N/GaN nanocolumns (NCs) that grew uniformly inclined towards the patterned, semi-polar GaN( 11 2 ̄ 2 ) substrate surface by molecular beam epitaxy. For the practical realization of the tomographic experiment, the nanocolumn axis has been aligned parallel to the rotation axis of the electron microscope goniometer. The tomographic reconstruction allows for the determination of the three-dimensional indium distribution inside the nanocolumns. This distribution is strongly interrelated with the nanocolumn morphology and faceting. The (In,Ga)N layer thickness and the indium concentration differ between crystallographically equivalent and non-equivalent facets. The largest thickness and the highest indium concentration are found at the nanocolumn apex parallel to the basal planes. http://dx.doi.org/10.1063/1.4914102
collection DOAJ
language English
format Article
sources DOAJ
author M. Niehle
A. Trampert
S. Albert
A. Bengoechea-Encabo
E. Calleja
spellingShingle M. Niehle
A. Trampert
S. Albert
A. Bengoechea-Encabo
E. Calleja
Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
APL Materials
author_facet M. Niehle
A. Trampert
S. Albert
A. Bengoechea-Encabo
E. Calleja
author_sort M. Niehle
title Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
title_short Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
title_full Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
title_fullStr Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
title_full_unstemmed Electron tomography of (In,Ga)N insertions in GaN nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) GaN templates
title_sort electron tomography of (in,ga)n insertions in gan nanocolumns grown on semi-polar ( 11 2 ̄ 2 ) gan templates
publisher AIP Publishing LLC
series APL Materials
issn 2166-532X
publishDate 2015-03-01
description We present results of scanning transmission electron tomography on GaN/(In,Ga)N/GaN nanocolumns (NCs) that grew uniformly inclined towards the patterned, semi-polar GaN( 11 2 ̄ 2 ) substrate surface by molecular beam epitaxy. For the practical realization of the tomographic experiment, the nanocolumn axis has been aligned parallel to the rotation axis of the electron microscope goniometer. The tomographic reconstruction allows for the determination of the three-dimensional indium distribution inside the nanocolumns. This distribution is strongly interrelated with the nanocolumn morphology and faceting. The (In,Ga)N layer thickness and the indium concentration differ between crystallographically equivalent and non-equivalent facets. The largest thickness and the highest indium concentration are found at the nanocolumn apex parallel to the basal planes.
url http://dx.doi.org/10.1063/1.4914102
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