Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

A one-time etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform for mid-infrared (MIR) bio-chemical sensing applications....

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Bibliographic Details
Main Authors:	Zhang Zecen, Ng Geok Ing, Hu Ting, Qiu Haodong, Guo Xin, Wang Wanjun, Rouifed Mohamed S., Liu Chongyang, Sia Jiaxu, Zhou Jin, Wang Hong
Format:	Article
Language:	English
Published:	EDP Sciences 2018-01-01
Series:	ITM Web of Conferences
Online Access:	https://doi.org/10.1051/itmconf/20181702005

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