Selective Carbon Material Engineering for Improved MEMS and NEMS
The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including...
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-08-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/10/8/539 |