The Effect of Certain Complex Chemostimulators and Modifi ers on InP Thermal Oxidation
It is advisable to control characteristics and rate of formation of nanoscale fi lms on InP by introducing chemostimulators, modifi ers, or both simultaneously during the thermal oxidation of semiconductors. The chemostimulating effect of the compounds is determined by their transit role as oxygen t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2020-06-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: | |
| Online Access: | https://journals.vsu.ru/kcmf/article/view/2851/2840 |