Scratch-Profiles Study in Thin Films Using SEM and EDS
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
1984-01-01
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Series: | Active and Passive Electronic Components |
Online Access: | http://dx.doi.org/10.1155/APEC.11.237 |
ISSN: | 0882-7516 1563-5031 |
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