Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM

Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM

Positioning accuracy of micropositioning stage in scanning ion conductance microscopy is the key to obtain high-precision scanning model. Most piezoelectric ceramic micromotion platforms are used for that, and hysteresis characteristics are the main reason for the nonlinear characteristics of piezoe...

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Bibliographic Details
Main Authors:	Huiting Wen, Xiaolong Lu, Shiping Zhao, Xiaoyu Liu, Yang Yang, Song Leng
Format:	Article
Language:	English
Published:	Hindawi-Wiley 2021-01-01
Series:	Complexity
Online Access:	http://dx.doi.org/10.1155/2021/5537998

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