Transparent Microelectrode Arrays Fabricated by Ion Beam Assisted Deposition for Neuronal Cell in Vitro Recordings

Transparent Microelectrode Arrays Fabricated by Ion Beam Assisted Deposition for Neuronal Cell in Vitro Recordings

Microelectrode array (MEA) is a tool used for recording bioelectric signals from electrically active cells in vitro. In this paper, ion beam assisted electron beam deposition (IBAD) has been used for depositing indium tin oxide (ITO) and titanium nitride (TiN) thin films which are applied as transpa...

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Bibliographic Details
Main Authors:	Tomi Ryynänen, Ropafadzo Mzezewa, Ella Meriläinen, Tanja Hyvärinen, Jukka Lekkala, Susanna Narkilahti, Pasi Kallio
Format:	Article
Language:	English
Published:	MDPI AG 2020-05-01
Series:	Micromachines
Subjects:	microelectrode array (MEA) ion beam assisted electron beam deposition (IBAD) indium tin oxide (ITO) titanium nitride (TiN) neurons transparent
Online Access:	https://www.mdpi.com/2072-666X/11/5/497

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