The Helical Resonator: A Scheme for Radio Frequency Plasma Generation

The helical resonator is a scheme for the production of high voltage at radio frequency, useful for gas breakdown and plasma sustainment, which, through a proper design, enables avoiding the use of a matching network. In this work, we consider the treatment of the helical resonator, including a grou...

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Bibliographic Details
Main Authors: Emilio Martines, Roberto Cavazzana, Luigi Cordaro, Matteo Zuin
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/11/16/7444