Numerical Analysis of Thin Film Junctionless pH-ISFET Sensor
In this paper, a new pH-ISFET sensor, called the Junctionless ISFET sensor (JISFET), and its numerical analysis have been proposed, investigated and expected to improve the fabrication process and the sensitivity behavior for pH-ISFET sensor-based applications. The numerical analysis has been used t...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2010-12-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_2010/P_722.pdf |