Light-Sheet Microscopy for Surface Topography Measurements and Quantitative Analysis

A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 μm in <i>z</i>-direction, 10 μm in <i>x</i>-direction and 25...

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Bibliographic Details
Main Authors: Zhanpeng Xu, Erik Forsberg, Yang Guo, Fuhong Cai, Sailing He
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/10/2842
Description
Summary:A novel light-sheet microscopy (LSM) system that uses the laser triangulation method to quantitatively calculate and analyze the surface topography of opaque samples is discussed. A spatial resolution of at least 10 μm in <i>z</i>-direction, 10 μm in <i>x</i>-direction and 25 μm in <i>y</i>-direction with a large field-of-view (FOV) is achieved. A set of sample measurements that verify the system′s functionality in various applications are presented. The system has a simple mechanical structure, such that the spatial resolution is easily improved by replacement of the objective, and a linear calibration formula, which enables convenient system calibration. As implemented, the system has strong potential for, e.g., industrial sample line inspections, however, since the method utilizes reflected/scattered light, it also has the potential for three-dimensional analysis of translucent and layered structures.
ISSN:1424-8220