Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI

Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI

Bibliographic Details
Main Authors: Liu Yuling, Li Weiwei, Zhang Xihui, Liu Changyu
Format: Article
Language:English
Published: Hindawi Limited 2006-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/JNM/2006/29139
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spelling doaj-ca82327918a84f168e0cce9365f9c9012020-11-24T21:44:36ZengHindawi LimitedJournal of Nanomaterials1687-41101687-41292006-01-01200610.1155/JNM/2006/2913929139Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSILiu Yuling0Li Weiwei1Zhang Xihui2Liu Changyu3School of Information and Engineering, Hebei University of Technology, 8 Guangrong Road, Hongqiao District, Tianjin 300130, ChinaSchool of Information and Engineering, Hebei University of Technology, 8 Guangrong Road, Hongqiao District, Tianjin 300130, ChinaSchool of Information and Engineering, Hebei University of Technology, 8 Guangrong Road, Hongqiao District, Tianjin 300130, ChinaSchool of Information and Engineering, Hebei University of Technology, 8 Guangrong Road, Hongqiao District, Tianjin 300130, Chinahttp://dx.doi.org/10.1155/JNM/2006/29139
collection DOAJ
language English
format Article
sources DOAJ
author Liu Yuling
Li Weiwei
Zhang Xihui
Liu Changyu
spellingShingle Liu Yuling
Li Weiwei
Zhang Xihui
Liu Changyu
Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
Journal of Nanomaterials
author_facet Liu Yuling
Li Weiwei
Zhang Xihui
Liu Changyu
author_sort Liu Yuling
title Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
title_short Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
title_full Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
title_fullStr Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
title_full_unstemmed Control Effect of Nanometer SiO2 Hydrosol on Alloy Impurity in CMP Process of ULSI
title_sort control effect of nanometer sio2 hydrosol on alloy impurity in cmp process of ulsi
publisher Hindawi Limited
series Journal of Nanomaterials
issn 1687-4110
1687-4129
publishDate 2006-01-01
url http://dx.doi.org/10.1155/JNM/2006/29139
work_keys_str_mv AT liuyuling controleffectofnanometersio2hydrosolonalloyimpurityincmpprocessofulsi
AT liweiwei controleffectofnanometersio2hydrosolonalloyimpurityincmpprocessofulsi
AT zhangxihui controleffectofnanometersio2hydrosolonalloyimpurityincmpprocessofulsi
AT liuchangyu controleffectofnanometersio2hydrosolonalloyimpurityincmpprocessofulsi
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