Dynamic Deformation Measurement of Specular Surface with Deflectometry and Speckle Digital Image Correlation
The deformation measurement of a specular surface is of great importance during the quality inspection and installation of optical elements or wafers, especially those with large apertures. We propose a deflectometry method with speckle digital image correlation (DeSDIC) to realize the dynamic and h...
Main Authors: | Yao Hu, Shaopu Wang, Xuemin Cheng, Chengqiang Xu, Qun Hao |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-02-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/20/5/1278 |
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