Liquid Flow Meter based on a Thermal Anemometer Microsensor

Liquid Flow Meter based on a Thermal Anemometer Microsensor

An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.

Bibliographic Details
Main Author:	Oleg Sazhin
Format:	Article
Language:	English
Published:	Isfahan University of Technology 2016-01-01
Series:	Journal of Applied Fluid Mechanics
Subjects:	Thermal flow sensor; Heat mass transfer; Liquid flow meter; MEMS.
Online Access:	http://jafmonline.net/JournalArchive/download?file_ID=40289&issue_ID=235

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