Liquid Flow Meter based on a Thermal Anemometer Microsensor

Liquid Flow Meter based on a Thermal Anemometer Microsensor

An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.

Bibliographic Details
Main Author: Oleg Sazhin
Format: Article
Language:English
Published: Isfahan University of Technology 2016-01-01
Series:Journal of Applied Fluid Mechanics
Subjects:
Thermal flow sensor; Heat mass transfer; Liquid flow meter; MEMS.
Online Access:http://jafmonline.net/JournalArchive/download?file_ID=40289&issue_ID=235
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spelling doaj-c913a90c591e469d951fd0c72aa515922020-11-24T20:48:17ZengIsfahan University of Technology Journal of Applied Fluid Mechanics1735-35722016-01-019419911996.Liquid Flow Meter based on a Thermal Anemometer MicrosensorOleg Sazhin0Ural Federal UniversityAn analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.http://jafmonline.net/JournalArchive/download?file_ID=40289&issue_ID=235Thermal flow sensor; Heat mass transfer; Liquid flow meter; MEMS.
collection DOAJ
language English
format Article
sources DOAJ
author Oleg Sazhin
spellingShingle Oleg Sazhin
Liquid Flow Meter based on a Thermal Anemometer Microsensor
Journal of Applied Fluid Mechanics
Thermal flow sensor; Heat mass transfer; Liquid flow meter; MEMS.
author_facet Oleg Sazhin
author_sort Oleg Sazhin
title Liquid Flow Meter based on a Thermal Anemometer Microsensor
title_short Liquid Flow Meter based on a Thermal Anemometer Microsensor
title_full Liquid Flow Meter based on a Thermal Anemometer Microsensor
title_fullStr Liquid Flow Meter based on a Thermal Anemometer Microsensor
title_full_unstemmed Liquid Flow Meter based on a Thermal Anemometer Microsensor
title_sort liquid flow meter based on a thermal anemometer microsensor
publisher Isfahan University of Technology
series Journal of Applied Fluid Mechanics
issn 1735-3572
publishDate 2016-01-01
description An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.
topic Thermal flow sensor; Heat mass transfer; Liquid flow meter; MEMS.
url http://jafmonline.net/JournalArchive/download?file_ID=40289&issue_ID=235
work_keys_str_mv AT olegsazhin liquidflowmeterbasedonathermalanemometermicrosensor
_version_ 1716808355043868672

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