Ta2N3 nanocrystals grown in Al2O3 thin layers

Ta2N3 nanocrystals grown in Al2O3 thin layers

Tantalum nitride nanoparticles (NPs) and cubic bixbyite-type Ta2N3 nanocrystals (NCs) were grown in (Ta–N+Al2O3)/Al2O3 periodic multilayers (MLs) after thermal treatment. The MLs were prepared by magnetron deposition at room temperature and characterized using grazing incidence small-angle X-ray sca...

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Bibliographic Details
Main Authors: Krešimir Salamon, Maja Buljan, Iva Šarić, Mladen Petravić, Sigrid Bernstorff
Format: Article
Language:English
Published: Beilstein-Institut 2017-10-01
Series:Beilstein Journal of Nanotechnology
Subjects:
nanocomposites
multilayers
refractory plasmonics
self-assembly
Ta2N3 nanoparticles
Online Access:https://doi.org/10.3762/bjnano.8.215

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