Hybrid-Type Temperature Sensor Using Thin-Film Transistors

We have developed a hybrid-type temperature sensor using thin-film transistors. First, we evaluate temperature dependences of transistor characteristics and find that the temperature dependence of the off-leakage current is much larger than that of the on current. Next, we combine a transistor, capa...

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Bibliographic Details
Main Authors: Mutsumi Kimura, Kazuki Kojima, Tomonori Mukuda, Katsuya Kito, Hisashi Hayashi, Tokiyoshi Matsuda, Yasushi Hiroshima, Mitsutoshi Miyasaka
Format: Article
Language:English
Published: IEEE 2014-01-01
Series:IEEE Journal of the Electron Devices Society
Online Access:https://ieeexplore.ieee.org/document/6883115/
Description
Summary:We have developed a hybrid-type temperature sensor using thin-film transistors. First, we evaluate temperature dependences of transistor characteristics and find that the temperature dependence of the off-leakage current is much larger than that of the on current. Next, we combine a transistor, capacitor, and ring oscillator to develop the hybrid-type temperature sensor and detect the temperature by measuring the oscillation frequency. The large temperature dependences of the off-leakage currents can be utilized, and simultaneously only a digital circuit is required to count the digital pulse.
ISSN:2168-6734