Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates

Microelectromechanical system (MEMS) suspended inductors have excellent radio-frequency (RF) performance. The inductance value is one of the main features that characterizes the performance of inductors. It is important to consider the influence of the substrate and the suspension height in calculat...

Full description

Bibliographic Details
Main Authors: Yiyuan Li, Jianhua Li, Lixin Xu
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Micromachines
Subjects:
microelectromechanical system (MEMS)
MEMS suspended inductor
inductance value
Online Access:https://www.mdpi.com/2072-666X/9/11/604

Similar Items

Similar Items