Characteristic measurement of a surface acoustic wave nano-stepping motor by using a fiber-optic Michelson interferometer
The actuation technique of a surface acoustic wave motor with nanometer scale linear motion was experimentally investigated in this study. The surface acoustic wave motor comprised a stator made of a Y+128° cut, X-propagation lithium niobate substrate with silicon sliders and an array of pillar proj...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2019-09-01
|
| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814019876190 |