A method for positioning the focal spot location of two photon polymerization

A method for positioning the focal spot location of two photon polymerization

In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 μm × 200 μm square area. The cutting location of these lines changed continuously. The first layer of structure to be...

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Main Authors: Xu Zheng, Kai Cheng, Xiaoqin Zhou, Jieqiong Lin, Xian Jing
Format: Article
Language:English
Published: AIP Publishing LLC 2017-09-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4986102
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spelling doaj-c613263a045a4046be26edb16aa7a59a2020-11-24T22:36:44ZengAIP Publishing LLCAIP Advances2158-32262017-09-0179095318095318-810.1063/1.4986102069709ADVA method for positioning the focal spot location of two photon polymerizationXu Zheng0Kai Cheng1Xiaoqin Zhou2Jieqiong Lin3Xian Jing4College of Mechanical Science and Engineering, Jilin University, Changchun, Jilin Province 130012, ChinaCollege of Mechanical Science and Engineering, Jilin University, Changchun, Jilin Province 130012, ChinaCollege of Mechanical Science and Engineering, Jilin University, Changchun, Jilin Province 130012, ChinaKey Laboratory of Micro/Nano and Ultra-precision Manufacturing, School of Mechatronic Engineering, Changchun University of Technology, Changchun, Jilin Province 130012, ChinaKey Laboratory of Micro/Nano and Ultra-precision Manufacturing, School of Mechatronic Engineering, Changchun University of Technology, Changchun, Jilin Province 130012, ChinaIn this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 μm × 200 μm square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 μm × 200 μm square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height.http://dx.doi.org/10.1063/1.4986102
collection DOAJ
language English
format Article
sources DOAJ
author Xu Zheng
Kai Cheng
Xiaoqin Zhou
Jieqiong Lin
Xian Jing
spellingShingle Xu Zheng
Kai Cheng
Xiaoqin Zhou
Jieqiong Lin
Xian Jing
A method for positioning the focal spot location of two photon polymerization
AIP Advances
author_facet Xu Zheng
Kai Cheng
Xiaoqin Zhou
Jieqiong Lin
Xian Jing
author_sort Xu Zheng
title A method for positioning the focal spot location of two photon polymerization
title_short A method for positioning the focal spot location of two photon polymerization
title_full A method for positioning the focal spot location of two photon polymerization
title_fullStr A method for positioning the focal spot location of two photon polymerization
title_full_unstemmed A method for positioning the focal spot location of two photon polymerization
title_sort method for positioning the focal spot location of two photon polymerization
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2017-09-01
description In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 μm × 200 μm square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 μm × 200 μm square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height.
url http://dx.doi.org/10.1063/1.4986102
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