Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

Tunable Clamped–Guided Arch Resonators Using Electrostatically Induced Axial Loads

We present a simulation and experimental investigation of bi-directional tunable in-plane clamped–guided arch microbeam resonators. Tensile and compressive axial forces are generated from a bi-directional electrostatic actuator, which modulates the microbeam stiffness, and hence changes its natural...

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Bibliographic Details
Main Authors: Nouha Alcheikh, Abdallah Ramini, Md Abdullah Al Hafiz, Mohammad I. Younis
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Micromachines
Subjects:
microresonators
clamped–guided arch beams
bi-directional electrostatic actuator
Online Access:http://www.mdpi.com/2072-666X/8/1/14

Internet

http://www.mdpi.com/2072-666X/8/1/14

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