ESD Improvements on Power N-Channel LDMOS Devices by the Composite Structure of Super Junctions Integrated With SCRs in the Drain Side
This paper studies a composite power n-channel lateral-diffused MOSFET device with a super junction (SJ) and parasitic silicon-controlled rectifier structure (nLDMOS-SJ-SCR) in the drain side, which can be used for electrostatic discharge (ESD) and latch-up (LU) reliability enhancements of 60-V powe...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9153755/ |