Performance Recovery of Silicon-Avalanche- Photodiode Electron Detector by Low-Temperature Annealing
We report that the silicon avalanche photodiode (APD) for electron detection almost fully recovers from the damage caused by electron irradiation by annealing. With the electron irradiation at an energy of 8 keV, a prominent increase of the non-amplified component of the dark current was observed, a...
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2013-01-01
|
Series: | IEEE Journal of the Electron Devices Society |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/6601677/ |