High-temperature stable piezoelectric transducers using epitaxially grown electrodes
<p>Piezoelectric resonators are of great importance for application in high-precision transducers. However, at elevated temperatures, the degradation of commonly used metal electrodes may affect the performance of oxide electrodes of piezoelectric transducers; with sufficiently high electrical...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2020-01-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/9/15/2020/jsss-9-15-2020.pdf |