Hearing Aid Sensitivity Optimization on Dual MEMS Microphones Using Nano-Electrodeposits

Hearing Aid Sensitivity Optimization on Dual MEMS Microphones Using Nano-Electrodeposits

We present an in-situ sensitivity tuning method for MEMS (micro-electromechanical systems) microphones via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Nano-electrodeposits are electrochemically grown and dissolved on an Ag-doped Ge-Se sol...

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Bibliographic Details
Main Authors:	Sang-Soo JE, Jeonghwan KIM, Michael N. KOZICKI, Junseok CHAE
Format:	Article
Language:	English
Published:	IFSA Publishing, S.L. 2009-10-01
Series:	Sensors & Transducers
Subjects:	Micro-electromechanical systems microphone Nano-electrodeposits growth and retraction Sensitivity adjustment Sensitivity tuning Directivity index
Online Access:	http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_94.pdf

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