In-plane micro-displacement measurement based on secondary diffraction
For precision machinery, the measurement of the relative in-plane displacement of two parallel planes that are separated by several meters is important. In this paper, a theoretical model for measuring the relative in-plane microdisplacement between two parallel planes was developed on the basis of...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5143339 |