IDENTIFICATION OF NONLINEAR MODEL PARAMETERS FOR RAPID THERMAL PROCESSES

IDENTIFICATION OF NONLINEAR MODEL PARAMETERS FOR RAPID THERMAL PROCESSES

A problem of parameters identification is considered for a nonlinear model of rapid thermal processes. A hybrid approach is proposed for parameter estimation combining both analytical solution and numerical optimization. At the first step, the rate of temperature change is estimated from experiment...

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Bibliographic Details
Main Authors: A. A. Kapitonov, S. V. Aranovskiy
Format: Article
Language:English
Published: Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University) 2014-07-01
Series:Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki
Subjects:
nonlinear system identification
prediction error minimization
rapid thermal processes
vapor deposition processing
Online Access:http://ntv.ifmo.ru/file/article/10390.pdf

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