ABOUT TECHNOLOGIES OF X-RAY SYSTEMS FOR CONTROL OF ELECTRONIC COMPONENTS

ABOUT TECHNOLOGIES OF X-RAY SYSTEMS FOR CONTROL OF ELECTRONIC COMPONENTS

Introduction. X-ray methods are currently widely used in manufacturing of various products and components of the electronics industry, including micro- and nano-electronics. One of the most informative and illustrative methods is projection X-ray microscopy. Specialized X-ray systems for process con...

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Bibliographic Details
Main Authors:	Anatoly I. Mazurov, Nikolay N. Potrakhov
Format:	Article
Language:	Russian
Published:	Saint Petersburg Electrotechnical University "LETI" 2019-07-01
Series:	Известия высших учебных заведений России: Радиоэлектроника
Subjects:	x-ray projection microscopy sealed (closed) microfocus tubes collapsible (open) microfocus tubes microfocus x-ray systems resolution
Online Access:	https://re.eltech.ru/jour/article/view/330

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