Multiparametric Porous Silicon Sensors

Multiparametric Porous Silicon Sensors

We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wa...

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Main Authors: L. Pavesi, C. Oton, L. Pancheri, Z. Gaburro, G. Sberveglieri, G. Faglia, C. Baratto
Format: Article
Language:English
Published: MDPI AG 2002-04-01
Series:Sensors
Subjects:
Porous silicon
Optical microcavity
Gas sensor
Nitrogen dioxide
Online Access:http://www.mdpi.com/1424-8220/2/3/121/
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spelling doaj-c24ca9d13d064244809aec6787bbbb662020-11-25T00:21:03ZengMDPI AGSensors1424-82202002-04-012312112610.3390/s20300121Multiparametric Porous Silicon SensorsL. PavesiC. OtonL. PancheriZ. GaburroG. SberveglieriG. FagliaC. BarattoWe investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO2 (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.http://www.mdpi.com/1424-8220/2/3/121/Porous siliconOptical microcavityGas sensorNitrogen dioxide
collection DOAJ
language English
format Article
sources DOAJ
author L. Pavesi
C. Oton
L. Pancheri
Z. Gaburro
G. Sberveglieri
G. Faglia
C. Baratto
spellingShingle L. Pavesi
C. Oton
L. Pancheri
Z. Gaburro
G. Sberveglieri
G. Faglia
C. Baratto
Multiparametric Porous Silicon Sensors
Sensors
Porous silicon
Optical microcavity
Gas sensor
Nitrogen dioxide
author_facet L. Pavesi
C. Oton
L. Pancheri
Z. Gaburro
G. Sberveglieri
G. Faglia
C. Baratto
author_sort L. Pavesi
title Multiparametric Porous Silicon Sensors
title_short Multiparametric Porous Silicon Sensors
title_full Multiparametric Porous Silicon Sensors
title_fullStr Multiparametric Porous Silicon Sensors
title_full_unstemmed Multiparametric Porous Silicon Sensors
title_sort multiparametric porous silicon sensors
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2002-04-01
description We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i.e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO2 (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.
topic Porous silicon
Optical microcavity
Gas sensor
Nitrogen dioxide
url http://www.mdpi.com/1424-8220/2/3/121/
work_keys_str_mv AT lpavesi multiparametricporoussiliconsensors
AT coton multiparametricporoussiliconsensors
AT lpancheri multiparametricporoussiliconsensors
AT zgaburro multiparametricporoussiliconsensors
AT gsberveglieri multiparametricporoussiliconsensors
AT gfaglia multiparametricporoussiliconsensors
AT cbaratto multiparametricporoussiliconsensors
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