Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Fabrication of wafer-scale nanogratings for X-ray spectroscopy is difficult especially for very high line densities. The authors use vacancy epitaxy to fabricate sub-50-nm-periodicity gratings, coated with multilayers for efficient operation, for use in ultra-high resolution x-ray spectroscopy.

Bibliographic Details
Main Authors: Qiushi Huang, Qi jia, Jiangtao Feng, Hao Huang, Xiaowei Yang, Joerg Grenzer, Kai Huang, Shibing Zhang, Jiajie Lin, Hongyan Zhou, Tiangui You, Wenjie Yu, Stefan Facsko, Philippe Jonnard, Meiyi Wu, Angelo Giglia, Zhong Zhang, Zhi Liu, Zhanshan Wang, Xi Wang, Xin Ou
Format: Article
Language:English
Published: Nature Publishing Group 2019-06-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-019-10095-2

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