CALIBRATION OF DEVICES FOR MEASURING ELEMENTS OF MICRO-ELECTRONIC STRUCTURES
Development of microelectronics requires solution of the problem ensuring unity of linear measurements in a submicron range. The problem can be solved on the condition that calibration of measuring devices shall be made in accordance with reference samples that is a short length scale.While making c...
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| Format: | Article |
| Language: | Russian |
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Belarusian National Technical University
2012-08-01
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| Series: | Nauka i Tehnika |
| Online Access: | https://sat.bntu.by/jour/article/view/290 |