A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms
This letter reports a micro-electro-mechanical systems (MEMS) resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms. The sensor comprises two symmetrically-distributed double-ended tuning fork (DETF) resonators, each of which connects with dual...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4965253 |