Influence of beam radius on deposition parameters in dielectric under high energy electron irradiation
To study the influence of the electron beam radius on the deposition parameters in dielectric under high energy electron irradiation, a model of dielectric irradiated by plane electron beam source was established. Monte Carlo simulation method was used to calculate the distribution of the injection...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201818909001 |