Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias
This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC f...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2014-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2014/542023 |
| Summary: | This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC frequency is near natural frequency. This drives the resonator into nonlinear parametric resonance. The method of multiple scales (MMS) is used to solve the dimensionless differential equation of motion of the resonator and find the steady-state solutions. The reduced order model (ROM) method is used to validate the results obtained using MMS. The effect of the soft DC voltage (bias) component on the frequency response is reported. It is shown that the DC bias changes the subcritical Hopf bifurcation into a cyclic fold bifurcation and shifts the bifurcation point (where the system loses stability) to lower frequencies and larger amplitudes. |
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| ISSN: | 1070-9622 1875-9203 |